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Technology for Exploration, Discovery, and Invention


FEI is a leading diversified scientific instruments company. It is a premier provider of electron and ion-beam microscopes and tools for nanoscale applications across many industries: industrial and academic materials research, life sciences, semiconductors, data storage, natural resources and more. With a 60-year history of technological innovation and leadership, FEI has set the performance standard in transmission electron microscopes (TEM), scanning electron microscopes (SEM) and DualBeams(tm), which combine a SEM with a focused ion beam (FIB). FEI's imaging systems provide 3D characterization, analysis and modification/prototyping with resolutions down to the sub-Angstrom (one-tenth of a nanometer) level. FEI's NanoPorts in North America, Europe and Asia provide centers of technical excellence where its world-class community of customers and specialists collaborate. FEI has approximately 1800 employees and sales and service operations in more than 50 countries around the world.


  • Inspect™ Family

    The Inspect™ Family offers two scanning electron microscopes (SEM), one with field emission gun (FEG) capabilities, to provide the ultimate in high-resolution imaging required for today’s advanced research and industrial applications involving material inspection and characterization.

  • Quanta™ Family

    The Quanta™ Family of tools, with a variety of SEM/ESEM models and a DualBeam (FIB/SEM) system, offers advanced, flexible solutions that make it easy to explore any sample, whether non-conductive, moist, wet or dirty, in low-vacuum, high-vacuum or ESEM modes.

  • The Nova™ Family

    The Nova™ Family provides three scanning electron microscopes (SEM) with ESEM technology, and two DualBeam™ (FIB/SEM) models, ideal for diverse characterization, analysis, nanostructure prototyping and sample preparation tasks.

  • The Helios NanoLab™

    The Helios NanoLab™ , a DualBeam for semiconductor and data storage labs, as well as industries and researchers facing today’s most challenging applications, combines the most advanced scanning electron microscope (SEM) and focused ion beam (FIB) technologies with innovative gas chemistries, detectors and manipulators.

  • Strata™ Family

    Strata™ Family: Two DualBeam (FIB/SEM) systems that provide high-resolution characterization and analysis, as well as S/TEM sample preparation and imaging

  • FEI V600FIB™

    The FEI V600FIB™ is the most efficient, flexible, and cost-effective circuit edit tool available for semiconductor labs. It enables fast, versatile modification and analysis with a single-column, focused ion beam (FIB) that effectively delivers high throughput circuit modification, cross-sectioning, and failure analysis.

  • Tecnai™ Family

    Tecnai™ Family: Flexible TEM models designed specifically to provide ultra-high resolution sample characterization, analysis, and 3D tomographic imaging.

  • Titan™ 80-300 kV TEM

    The Titan™ 80-300 kV TEM is a high-end imaging and analytical S/TEM instrument dedicated to corrector and monochromator technologies. The Titan was designed for optimum stability, enabling sub-Ångström imaging of nanostructures in both TEM and S/TEM modes.