High Vacuum Pumps

Description

1. TURBOVAC / TURBOVAC MAG

High vacuum pumps with mechanical, magnetic or hybrid bearings for use in diverse applications requiring clean high and ultra-high vacuum.

• TURBOVAC i/iX
  • The TURBOVAC i / iX series is a modular line of turbomolecular vacuum pumps. With the integrated drive electronics (frequency converter) it forms a single unit.
• TURBOVAC MAGiNTEGRA
  • The TURBOVAC MAGiNTEGRA turbomolecular vacuum pumps are most compact magnetically levitated pumps
• TURBOVAC Mechanical Rotor Suspension
  • The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary from 35 l/s to 2400 l/s.

2. Oil-Diffusion Vacuum Pumps

The pumping action of diffusion pumps and fluid entrainment pumps is generally based on the transporting capacity of the vapor jet.

• Diffusion Vacuum Pumps
  • The pumping action of diffusion pumps and fluid entrainment pumps is generally based on the transporting capacity of the vapor jet.
• DIJ Oil Diffusion Vacuum Pumps
  • DIJ – The new series of oil diffusion pumps

3. Cryo Vacuum Pumps

Cryo vacuum pumps are gas entrapment cryo pumps where gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation, cryosorption or cryotrapping.

• COOLPAK – Compressor Units
  • COOLPAK compressors are available for single operation of the remaining cold heads from the COOLPOWER line and for cryostats, as well as for single and multiple operation of cryopumps from the COOLVAC line.
• COOLVAC
  • The COOLVAC cry vacuum pumps are gas entrapment pumps for generation of high and ultra-high vacuum.
• COOLPOWER
  • COOLPOWER cold heads are refrigerators operating on the basis of a thermodynamic cycle to produce cryogenic temperatures.