NANO – Robotics Solutions for Electron Microscopes

Description

Imina Technologies’ Nanoprobing SEM Solutions are turnkey for electrical characterization of microelectronic devices and in situ semiconductor failure analysis.

Up to 8 miBot™ nanoprobers can be delivered in various configurations to adapt to customer applications requirements and equipment. The miBot™ —our famously easy-to-use and versatile piezoactuated micro robots— allows you to position the probes over millimeter scale samples with a resolution down to the nanometer. The 4 degrees of freedom of these nanoprobers enables the operator to easily adjust the orientation of probes in situ during experiment.

The circular platforms can either be mounted on the SEM sample positioning stage, or be loaded via the SEM load-lock. A set of adapters is provided with the packages and enables to retrofit virtually any SEM, even those with small chamber.

Specifically designed for low current measurements, electrical characterization of nanostructures can be carried out with third party source-meter units (SMU) and signal analyzers through the shielded cabling, featuring an excellent signal-to-noise ratio.

Best in class in situ preamplifiers and scan generators are compatible with the Nanoprobing Solutions to perform quantitative EBIC and low noise EBAC/RCI analyses.

While the installation and removal of the stage mounted version only takes a few minutes and doesn’t require to permanently modify the chamber of your microscope, the load-lock compatible version provides the highest throughput to exchange the device under test and the probe tips by avoiding the need to open the chamber.

An aperture centered on the robot platform fits various types of SEM stubs, letting you observe the specimen just like you are used to.

Features

• Short working distances

• Magnetic immersion imaging

• Tilted angle

• Flexible platform configurations

• One software to control, measure and report

• Probe holders: quick tips replacement

• Fast installation and removal

Typical Applications

• Transistor characterization

• Semiconductor failure analysis (EBIC / EBAC)

• Resistivity measurements (I-V / C-V)

• Sample preparation

Supplier: IMINA Technologies